Integrated Systems and Photonics

19.05.2021 Publication in the journal of Nanomanufacturing: "Greyscale 2D nanograting fabrication by multistep nanoimprint lithography and ion beam etching"

May 28, 2021

  • J. Buhl, D. Yoo, M. Köpke, M. Gerken, "Greyscale 2D nanograting fabrication by multistep nanoimprint lithography and ion beam etching",  Nanomanufacturing 2021, vol. 1, no. 1, p 39-48, May 2021
    Link: https://doi.org/10.3390/nanomanufacturing1010004